Guidance on use of VCSMs

It is assumed that the reader is familiar with the production and handling of UHV components. The successful application of vacuum stepper motors requires an appreciation of their thermal as well as their mechanical properties. Compared to motors operated in air, the available cooling means for motors in vacuum are much less effective.

Apart from extending the run time, operation at low temperature improves the outgassing performance of motors. Therefore, minimum running times and motor currents should always be pursued. Selection of the largest motor possible for the application will result in longer running times, lower motor temperature and lowest outgassing.

Design mechanisms with balanced loads whenever possible or arrange that either the static friction in the system or the motor detent torque will hold position without the necessity of maintaining phase currents to produce a holding torque. The IH command may be used to reduce the phase currents and produce a holding torque which is intermediate between the pull-out torque and the detent torque. Refer to section 8.6 for a full description of power reduction techniques.

Many applications that appear to require continuous running, for example, substrate rotation for ensuring uniformity of deposition or implantation, can be equally well performed by intermittent short periods of stepping at low duty cycle. Stepper motors should not be disassembled as this partially demagnetises the permanent magnet in the rotor and permanently reduces the torque.

Operating temperature and run times

 

Outgassing and bakeout

 

Resonances

Load inertia, friction and drive characteristics

 

Control of resonance

 

Mechanisms for use with VCSMs

The following section is an introduction to this topic and is intended to indicate the major mechanical and vacuum considerations for various types of mechanisms. A working knowledge of mechanics and vacuum construction techniques is assumed. AML supply a range of standard mechanisms which can be customised, as well as designing custom mechanisms and components.

Rotation (Position control)

 

Rotation (Speed control)

 

Translation

 

Linear guides

 

Reduction gearing

 

Bearings

 

Magnetic fields near motor

Low power techniques

Techniques applicable to all applications

 

Techniques where step rates less than 100 Hz

 

Possible causes of damage to VCSMs

Bearing damage

 

Debris inside the motor

 

Overheating

Motors which have been heated to 230 °C will produce a much greater gas load thereafter, although their electromechanical performance may not be affected. In extreme cases, the insulating material will ablate and deposit itself as a yellow powder inside the motor case and on any cool surfaces in line with the pumping holes.

Motors can overheat very quickly in vacuum. This is very unlikely to happen with a properly connected SMD3 drive. Never use a drive capable of providing more than 1 amp of phase current and ensure that the drive current is removed as soon as the indicated temperature exceeds 190 °C. This is performed automatically by the SMD3.