Guidance on use of VCSMs

It is assumed that the reader is familiar with the production and handling of UHV components. The successful application of vacuum stepper motors requires an appreciation of their thermal as well as their mechanical properties. Compared to motors operated in air, the available cooling means for motors in vacuum are much less effective.

Apart from extending the run time, operation at low temperature improves the outgassing performance of motors. Therefore, minimum running times and motor currents should always be pursued. Selection of the largest motor possible for the application will result in longer running times, lower motor temperature and lowest outgassing.

Design mechanisms with balanced loads whenever possible or arrange that either the static friction in the system or the motor detent torque will hold position without the necessity of maintaining phase currents to produce a holding torque. The IH command may be used to reduce the phase currents and produce a holding torque which is intermediate between the pull-out torque and the detent torque. Refer to section 8.6 for a full description of power reduction techniques.

Many applications that appear to require continuous running, for example, substrate rotation for ensuring uniformity of deposition or implantation, can be equally well performed by intermittent short periods of stepping at low duty cycle. Stepper motors should not be disassembled as this partially demagnetises the permanent magnet in the rotor and permanently reduces the torque.

Operating temperature and run times

The maximum recommended running temperature of AML motors is 190 °C, as measured by the embedded type K thermocouple or RTD.

Current D-series motors have published temperature and time graphs for typical operating conditions with the motor mounted by its flange. Continuous running can readily be achieved with care at medium phase currents. Run times at higher currents can be increased by additional heatsinking at the other end of the motor.

Some AML motors are suitable for operation at 77 °K and they are believed to be suitable for use at lower temperatures. Because the resistance of the windings at low temperatures is small, the efficiency of the motor is much greater than at normal temperatures. A resistance of a few ohms should be connected in series with each winding, in order to present a normal load to the SMD3. The leads of the motor will be very brittle at low temperatures and should not be allowed to flex. The normal mechanical and electrical properties of all materials are recovered on return to room temperature.

Outgassing and bakeout

Newly installed motors will outgas, mainly due to water-vapour retention in polyimide. As this material is microporous the water is released rapidly, and the rate will subside after a few hours. The rate may be accelerated by running the motor to self-heat it.

Baking at up to 200 °C is permissible, and a 24-hour bake at this temperature will normally reduce the outgassing to its minimum.

Motors are typically operated at some distance from the chamber walls where the bakeout temperature is most often controlled. If the temperature indicated by the motor temperature sensor during bakeout is not high enough when the bakeout period is well advanced, it may be increased to 200 °C by using the bake mode, see section 5.2.5. This energises both phases, keeping the motor stationary in a half-step position. Phase current is modulated to achieve the programmed setpoint. Keeping the motor hot by this means while the rest of the vacuum system cools is recommended as this will prevent condensation on the motor.

Where internal infra-red heaters are used for bakeout it is advisable to shield the motor from direct radiation and to achieve the desired temperature during bakeout by using the bake program, see section 5.2.5.

Irreversible deterioration of the winding insulation will begin to occur above 230 °C and the motor may subsequently produce larger amounts of gas, even at lower temperatures.

Resonances

Load inertia, friction and drive characteristics

The primary (lower) resonant frequency cannot be stated with any precision, since it is modified by the friction and inertia of the load, the temperature of the motor and by the characteristics of the drive. Coupling a load inertia reduces the resonant frequency and decreases the damping factor. Load friction increases damping. Because the drive circuits of the SMD3 produce a controlled phase current this produces heavy damping. Drives which are voltage sources and which rely on the motor winding and other resistance to define the current have a lower damping factor.

The effect of changing the damping on the single step response of the motor is shown in the diagram below.

Control of resonance

Mechanisms for use with VCSMs

The following section is an introduction to this topic and is intended to indicate the major mechanical and vacuum considerations for various types of mechanisms. A working knowledge of mechanics and vacuum construction techniques is assumed. AML supply a range of standard mechanisms which can be customised, as well as designing custom mechanisms and components.

Rotation (Position control)

Rotation (Speed control)

Translation

Linear guides

Reduction gearing

Bearings

Magnetic fields near motor

Low power techniques

Techniques applicable to all applications

Techniques where step rates less than 100 Hz

Possible causes of damage to VCSMs

Vacuum motors must be de-magnetised before disassembly and re-magnetised and cleaned after repair. For these reasons most will need to be returned to AML for repair. The notes below offer guidance on the avoidance of the most common problems and diagnostic advice.

Bearing damage

The ceramic balls in the bearings are very strong but more brittle than steel balls. Dropping the motor on its end will probably break some balls. The damage is occasionally visible and any roughness felt when rotating the shaft manually will indicate that this has happened.

Debris inside the motor

Foreign material can enter the motor via the pumping holes and gaps in the bearings. Particles of magnetic materials are particularly likely to be attracted through the pumping holes and they eventually migrate into the gap between the rotor and stator. They usually cause the rotor to stick at one or more points per revolution and can often only be felt when rotating in a specific direction. Fortunately, the larger motors have enough torque to grind them into a dust.

The main cause of this type of problem has been users modifying shafts. This can be avoided by sealing the motor inside a cleaned polyethylene bag and supervising the machining closely. Clean the projecting shaft and remove magnetic particles with a magnet before opening the bag. Remove the motor or similarly seal it if any filing or drilling of nearby components is done.

Overheating

Motors which have been heated to 230 °C will produce a much greater gas load thereafter, although their electromechanical performance may not be affected. In extreme cases, the insulating material will ablate and deposit itself as a yellow powder inside the motor case and on any cool surfaces in line with the pumping holes.

Motors can overheat very quickly in vacuum. This is very unlikely to happen with a properly connected SMD3 drive. Never use a drive capable of providing more than 1 amp of phase current and ensure that the drive current is removed as soon as the indicated temperature exceeds 190 °C. This is performed automatically by the SMD3.